Heat Resistance

Heat Resistance

Perfluorinated Elastomer Components Heat Resistance

Heat Resistance 

The excellent thermal stability and chemical resistance of perfluorinated elastomer components is attributed to the strong action of carbon-fluorine bonds in the perfluorinated chain. Even in long-term high-temperature environments of up to 325°C, our seals maintain greater elasticity and resilience than other elastomers. There is no plastic deformation, softening or hardening, which is often a key factor in seal performance degradation and eventual failure.

Low Compression Set

Our seals have a low compression deformation rate and can quickly return to their original thickness and shape when external pressure is removed. Our seals will not be permanently compressed or deformed even if they are under pressure for a long time in working condition, thus maintaining effective sealing performance.

Perfluorinated Elastomer Components Heat Resistance


Heat Resistance 

The excellent thermal stability and chemical resistance of perfluorinated elastomer components is attributed to the strong action of carbon-fluorine bonds in the perfluorinated chain. Even in long-term high-temperature environments of up to 325°C, our seals maintain greater elasticity and resilience than other elastomers. There is no plastic deformation, softening or hardening, which is often a key factor in seal performance degradation and eventual failure.

Low Compression Set

Our seals have a low compression deformation rate and can quickly return to their original thickness and shape when external pressure is removed. Our seals will not be permanently compressed or deformed even if they are under pressure for a long time in working condition, thus maintaining effective sealing performance.

More Solutions

Minimize wafer contamination

Minimize wafer contamination


Perfluorinated rubber (FFKM) is used as a seal on wafer processing equipment due to its superior resistance to chemicals, including reactive plasma and extreme temperatures up to 330°C.

Rapid Gas Decompression

Rapid Gas Decompression


The fast gas decompression performance of FFKM (fluorinated elastomer) seals is a key feature in high-speed gas decompression applications.

Chemical Resistance

Chemical Resistance


Perfluorinated rubber (FFKM) components resist corrosion from more than 1,600 different chemicals, solvents and plasmas.

Outgassing Performance

Outgassing Performance


In wafer processing, sealing and degassing performance is very critical, because the presence or release of any gas can have a serious impact on the quality, accuracy and production efficiency of the wafer.