The excellent thermal stability and chemical resistance of perfluorinated elastomer components is attributed to the strong action of carbon-fluorine bonds in the perfluorinated chain.
Perfluorinated rubber (FFKM) is used as a seal on wafer processing equipment due to its superior resistance to chemicals, including reactive plasma and extreme temperatures up to 330°C.
The fast gas decompression performance of FFKM (fluorinated elastomer) seals is a key feature in high-speed gas decompression applications.
Perfluorinated rubber (FFKM) components resist corrosion from more than 1,600 different chemicals, solvents and plasmas.
In wafer processing, sealing and degassing performance is very critical, because the presence or release of any gas can have a serious impact on the quality, accuracy and production efficiency of the wafer.
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