Outgassing Performance
Seal Outgassing in Wafer Processing
In wafer processing, sealing and degassing performance is very critical, because the presence or release of any gas can have a serious impact on the quality, accuracy and production efficiency of the wafer. Wafer processing is usually carried out in a highly clean and low-pollution environment, and the sealing material and degassing performance are directly related to the stability and yield of the process. Wafer processing equipment usually uses a variety of chemical gases and gas mixtures, the volatiles of these gases (such as residual gases, solvents, etc.) may have a negative impact on the processing environment, and even affect the final product quality. Therefore, the degassing property of the material is particularly important in this process.
Seal Outgassing Test Results
Seal Outgassing in Wafer Processing
In wafer processing, sealing and degassing performance is very critical, because the presence or release of any gas can have a serious impact on the quality, accuracy and production efficiency of the wafer. Wafer processing is usually carried out in a highly clean and low-pollution environment, and the sealing material and degassing performance are directly related to the stability and yield of the process. Wafer processing equipment usually uses a variety of chemical gases and gas mixtures, the volatiles of these gases (such as residual gases, solvents, etc.) may have a negative impact on the processing environment, and even affect the final product quality. Therefore, the degassing property of the material is particularly important in this process.
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